Bookcover of Su-8 Micro-mask On 3D Freeform Surface Of Brittle Materials For AJM
Booktitle:

Su-8 Micro-mask On 3D Freeform Surface Of Brittle Materials For AJM

Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3D Freeform Brittle Materials

LAP LAMBERT Academic Publishing (2013-06-05 )

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ISBN-13:

978-3-659-40727-7

ISBN-10:
3659407275
EAN:
9783659407277
Book language:
English
Blurb/Shorttext:
Micro-blasting has established itself among the mainstream machining processes for difficult-to-cut workpieces like glasses, carbides, ceramics, etc., by using abrasive particles. Initially, during micro-blasting process non-machined areas are covered by protective mask. Today, either mask fabrication practice or micro-blasting process, none is secretive in the area of micro-manufacturing, but in the previous work, those processes were well suited and optimized for producing micro-features on planar workpieces. However, the demand for micro-features on 3D freeform substrate in MEMs and lab-on-a-chip devices imposes development of more refined non-planar micro-manufacturing techniques. In these concerns, this research focused on devising an appropriate photoresist mask required by micro-AJM processes on surface of a 3D freeform workpiece. The author investigated fundamental erosion mechanisms based on the SU-8 mask properties. Under optimal settings, the mask hardness and surface roughness were 25.04 HV and 1.14µm respectively. Through micro-AJM process, the engraved micro-features size on surface of 3D freeform workpiece was 447.1 µm- width and 11.6 µm- depth.
Publishing house:
LAP LAMBERT Academic Publishing
Website:
https://www.lap-publishing.com/
By (author) :
Jean Bosco Byiringiro
Number of pages:
156
Published on:
2013-06-05
Stock:
Available
Category:
Mechanical engineering, manufacturing technology
Price:
61.90 €
Keywords:
Mask hardness, Surface profile of the mask, SU-8 photoresist, 3D Freeform brittle materials

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