Bookcover of MeV electron irradiation of Si heterostructures
Booktitle:

MeV electron irradiation of Si heterostructures

Scholars' Press (2019-01-24 )

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ISBN-13:

978-613-8-50284-5

ISBN-10:
6138502841
EAN:
9786138502845
Book language:
English
Blurb/Shorttext:
Radiation defect generation by high-energy MeV electron irradiation of n- and p- type Si-SiO2 structure with different kind of oxides has been studied. The morphology changes of SiO2 oxide during MeV electrons irradiation was observed by AFM. Si+ ion implanted Si-SiO2 structures before and after MeV electron irradiation are presented. The redistribution of oxygen and silicon atoms and Si nanocrystal generation during MeV electron irradiation was observed by RBS/C and AFM techniques respectively. Optical properties, photoluminescence and spectroscopic studies of SiOx films irradiated with MeV electrons are carried out also.
Publishing house:
Scholars' Press
Website:
http://www.scholars-press.com
By (author) :
Sonia Kaschieva, Sergey N. Dmitriev
Number of pages:
148
Published on:
2019-01-24
Stock:
Available
Category:
Physics, astronomy
Price:
67.90 €
Keywords:
Si heterostructures, MOS strucrures, interfaces, MeV electron irradiation, Radiation defects - generation and annealing

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