Bookcover of Investigations on Magnetron Sputtered Titanium based Oxide Films
Booktitle:

Investigations on Magnetron Sputtered Titanium based Oxide Films

For Microelectronic Devices

LAP LAMBERT Academic Publishing (2016-05-24 )

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ISBN-13:

978-3-659-87481-9

ISBN-10:
3659874817
EAN:
9783659874819
Book language:
English
Blurb/Shorttext:
The size reduction of Complementary Metal Oxide Semiconductor (CMOS) transistors requires replacement of conventional SiO2 layer with higher dielectric constant (k) material for gate dielectric, in order to reduce the gate leakage current and also to maximize gate capacitance. Among the many possible transition- metal oxide materials, titanium dioxide (TiO2) is a potential candidate because of its high energy band gap, refractive index and dielectric constant.
Publishing house:
LAP LAMBERT Academic Publishing
Website:
https://www.lap-publishing.com/
By (author) :
Chandra Sekhar Musalikunta, Uthanna Suda
Number of pages:
180
Published on:
2016-05-24
Stock:
Available
Category:
Physics, astronomy
Price:
71.90 €
Keywords:
Sputtering, thin films, titanium oxide, Microelectronic devices

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