Bookcover of Investigation Of AlN Films And Creating Devices Based On Them
Booktitle:

Investigation Of AlN Films And Creating Devices Based On Them

LAP LAMBERT Academic Publishing (2015-05-20 )

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ISBN-13:

978-3-659-70821-3

ISBN-10:
3659708216
EAN:
9783659708213
Book language:
English
Blurb/Shorttext:
Progress of the modern means of communication, which mostly involves the increase of operating frequency of devices, dictates the necessity of implementing new materials that would allow to access higher frequencies in the microwave band. A number of exceptional characteristics make aluminum nitride a quite perspective material for a great variety of implementations, especially for creating acoustoelectronic devices. The goals of the present work were studying the processes of acquiring the aluminum nitride thin films using RF magnetron sputtering technique and investigating the possibilities of applying these films to create acoustoeletronic devices working on microwave and extremely high frequencies.
Publishing house:
LAP LAMBERT Academic Publishing
Website:
https://www.lap-publishing.com/
By (author) :
Rinat Khanbekov
Number of pages:
64
Published on:
2015-05-20
Stock:
Available
Category:
Mechanics, acoustics
Price:
23.90 €
Keywords:
Aluminum Nitride, Magnetron Sputtering, Piezoelectric transducer, acoustic delay line

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